Kawasaki Cleanroom NX520

The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.

• Servo complete digital system
• Controlled Axes: Maximum 7 axes
• Manual, semi-automatic, fully automatic teaching.
• External emergency stop, near security, external stop.
• Hardware: RS232C x 1 Ethernet.
• Software: K-Utility (original Kawasaki communication command for clean robots).
• Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
• Input signal: Maximum 16 channels.
• Output signal: Maximum of 8 channels
• Compatible robots series: NS, NT, NX, TT, TX and NV

• Servo complete digital system
• Controlled Axes: Maximum 12 axes
• Manual, semi-automatic, fully automatic teaching.
• External emergency stop, near security, external stop.
• Hardware: RS232C x 2 Ethernet.
• Software: K-Utility (original Kawasaki communication command for clean robots).
• Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
• Input signal: Maximum 96 channels
• Output signal: Maximum of 80 channels
• Compatible robots series: NS, NT, NX, TT, TX and NV